Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1992.05b
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- Pages.155-155
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- 1992
2 step W-CVD process using the poly Si for filling sub-micron contacts with high aspect ratio
서브마이크론 콘택을 매꾸기 위해 poly Si를 이용한 2단계 W-CVD
Abstract
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