Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1992.05b
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- Pages.150-150
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- 1992
The Properties of $ZrO_2$ and $Y_{2}O_{3}$ -Stabilized $ZrO_2$ Thin Films by Enhanced Chemical Vapor Deposition
플라즈마 화학증착법에 의한 $ZrO_2$ 박막과 $Y_{2}O_{3}$ 로안정화된 $ZrO_2$ 박막의 특성
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