Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1992.05b
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- Pages.147-148
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- 1992
Characteristics of low rsistive W and $W_{2}N$ thin films for ULSI
ULSI용 저저항 텅스텐 및 텅스텐질화박막의 특성
Abstract
Keywords