Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1992.05b
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- Pages.63-63
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- 1992
Fabrication of RF Cylindrical Magnetron and Its Application to Reactive Ion Etching
RF Cylindrical Magentron 의 제조 및 이의 Reactive Ion Etching에 대한 응용
Abstract
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