Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1992.05a
- /
- Pages.42-45
- /
- 1992
SPC Growth of Si Thin Films Preapared by PECVD
PECVD 방법으로 증착한 Si박막의 SPC 성장
Abstract
The poly silicon thin films were prepared by solid phase crystallization at 600
Keywords