Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1992.07a
- /
- Pages.103-104
- /
- 1992
The Effects of Reppeated Chemical Etching on the Si(111) Surface : Shiraki Oxidation
- Ki-Jung Kim (Jeonbuk National University , Deppartment of pphysics) ;
- Jae Myung Seo (Jeonbuk National University , Deppartment of pphysics)
- Published : 1992.07.01
Abstract
Keywords