Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1992.02a
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- Pages.77-78
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- 1992
The Study of W Depposition on si Substrate by SiH4 Reduction of WF6 in LppCVD System
- Sung Hoon Kim (Deppartment of Chemistry, Seoul National University) ;
- Se Ahn Song (deppartment of Materials Devices Research Center, Samsung Advanced Institute of Technology) ;
- Seong Keun Kim (Deppartment of Chemistry, Seoul National University)
- Published : 1992.02.01
Abstract
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