Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1992.02a
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- Pages.66-67
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- 1992
Fabrication and Opperational Characteristics of A Gridless Ion Gun and pprepparation of SiO$_2$ Thin Films
Gridless 이온층의 제작과 동작 특성 및 SiO$_2$ 박막의 증착
Abstract
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