초음파 Spectroscopy에 의한 박막두께 측정

Ultrasonic Spectroscopy technique, covering a wide frequency range, is one of the powerful Nondestructive Evaluation method for detection of microdefects and thickness measurement of thin film below the linit of ultrasonic distance resolution in various types of masterials and composites, provides a useful information that connot be obtained by a conventional measuring system using a single frequency. Results of computer simulation of multiple reflection wave were applied for particular cases : measurements of thickness and Ultrasonic wave velocities propagating normal to the surface in Acryle thin films can be evaluted by using the interference phenomenon, even dimensions of interest are smaller than the ultrasonic wavelength. The repeatability of the thickness measurement in 0.28 mm thin film was 10$\^$-3/.