대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1992년도 하계학술대회 논문집 B
- /
- Pages.949-951
- /
- 1992
직류 플라즈마 제트를 이용한 고속 다이아몬드 막 증착기술
High-Speed Deposition of Diamond Films by DC Plasma Jet
- Kim, Won-Kyu (Electrical Engineering and Science Research Center) ;
-
Whang, Ki-Woong
(Dept. of Electrical Engineering, Seoul National Univ.)
- 발행 : 1992.07.23
초록
A low pressure DC plasma jet has been used to obtain diamond films from a mixture of
키워드