Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1992.07b
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- Pages.900-902
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- 1992
A Study on The Development of Magnetoplasma For Surface Treatment
표면 처리용 자화 Plasma 형성에 관한 연구
- Son, I.Y. (Pusan National University) ;
- Jang, D.J. (Pusan National University) ;
- Kim, S.T. (Pusan National University) ;
- Kwak, Y.S. (Pusan National University) ;
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Cho, J.S.
(Pusan National University)
;
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Park, C.H.
(Pusan National University)
- Published : 1992.07.23
Abstract
In order to develope the uniform Plasma source which is able to make polymer or glass surface modification, the d.c glow discharge characteristics for the hemisphere -cylindrical electrode system with external d.c magnetic field are investigated. Single probe method has been used for detecting plasma parameters. We make uniform plasma generated to the external of electrode between hemisphere and cylindrical electrode. The surface treatment of metal and insulate has been performed by this uniform plasma.
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