Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1992.07b
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- Pages.843-846
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- 1992
-The Optical- and Ion-Induced Characteristics of a-$Se_{75}Ge_{25}$ Thin Film for Focused Ion Beam (FIB)-
집속이온빔 (FIB) 레지스트를 위한 비정질 $Se_{75}Ge_{25}$ 박막의 이온 및 광유기특성
- Lee, Hyun-Yong (Dep. of Electro. Mat. Eng., Kwang Woon Univ.) ;
- Park, Tae-Sung (Dep. of Electro. Mat. Eng., Kwang Woon Univ.) ;
- Kim, Jong-Bin (Dep. of Electro. Mat. Eng., Kwang Woon Univ.) ;
- Lee, Young-Jong (Dep. of Electro. Mat. Eng., Kwang Woon Univ.) ;
- Chung, Hong-Bay (Dep. of Electro. Mat. Eng., Kwang Woon Univ.) ;
- Cho, Guang-Sup (Dep. of Physics, Kwang Woon Univ.) ;
- Kang, Seung-Oun (Dep. of Physics, Kwang Woon Univ.) ;
- Hwang, Ho-Jung (Dep. of Electro. Eng., Chung Ang Univ.) ;
- Park, Sun-Woo (Dep. of Control & Instrumentation, Seoul City Univ.)
- 이현용 (광운대 전자재료공학과) ;
- 박태성 (광운대 전자재료공학과) ;
- 김종빈 (광운대 전자재료공학과) ;
- 이영종 (광운대 전자재료공학과) ;
- 정홍배 (광운대 전자재료공학과) ;
- 조광섭 (광운대 물리학과) ;
- 강승언 (광운대 물리학과) ;
- 황호정 (중앙대 전자공학과) ;
- 박선우 (서울시립대 제어계측공학과)
- Published : 1992.07.23
Abstract
This thesis was investigated on optical-and ion-induced characteristics in positive(a-
Keywords