대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1992년도 하계학술대회 논문집 B
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- Pages.717-720
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- 1992
Rf - magnetron sputtering system을 사용한 $YBa_2Cu_3O_x$ 초전도 박막의 제조
The preparation of $YBa_2Cu_3O_x$ superconducting thin film using rf - magnetron sputtering system
- 박성진 (전북대학교 대학원 전기공학과) ;
- 김민기 (전북대학교 대학원 전기공학과) ;
- 최성환 (전북대학교 대학원 전기공학과) ;
- 최효상 (전북대학교 대학원 전기공학과) ;
- 황종선 (전북대학교 대학원 전기공학과) ;
- 한병성 (전북대학교 전기공학과 부교수)
- Park, S.J. (Dep. of Elec. Eng. Graduate School, Chonbuk National University) ;
- Kim, M.K. (Dep. of Elec. Eng. Graduate School, Chonbuk National University) ;
- Choi, S.H. (Dep. of Elec. Eng. Graduate School, Chonbuk National University) ;
- Choi, H.S. (Dep. of Elec. Eng. Graduate School, Chonbuk National University) ;
- Hwang, J.S. (Dep. of Elec. Eng. Graduate School, Chonbuk National University) ;
- Han, B.S. (Associate prof., Dep. of Elec. Eng., Chonbuk National University)
- 발행 : 1992.07.23
초록
Since the discovery of High-Tc superconducting Y-Ba-Cu-O ceramics with critical temperature of about 90K, numerous efforts to prepare supercond ucting thin films with excellent qualities such as High-Tc and critical current density have been made. The samples were deposited onto
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