Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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The preparation of $YBa_2Cu_3O_x$ superconducting thin film using rf - magnetron sputtering system

Rf - magnetron sputtering system을 사용한 $YBa_2Cu_3O_x$ 초전도 박막의 제조

  • Park, S.J. (Dep. of Elec. Eng. Graduate School, Chonbuk National University) ;
  • Kim, M.K. (Dep. of Elec. Eng. Graduate School, Chonbuk National University) ;
  • Choi, S.H. (Dep. of Elec. Eng. Graduate School, Chonbuk National University) ;
  • Choi, H.S. (Dep. of Elec. Eng. Graduate School, Chonbuk National University) ;
  • Hwang, J.S. (Dep. of Elec. Eng. Graduate School, Chonbuk National University) ;
  • Han, B.S. (Associate prof., Dep. of Elec. Eng., Chonbuk National University)
  • 박성진 (전북대학교 대학원 전기공학과) ;
  • 김민기 (전북대학교 대학원 전기공학과) ;
  • 최성환 (전북대학교 대학원 전기공학과) ;
  • 최효상 (전북대학교 대학원 전기공학과) ;
  • 황종선 (전북대학교 대학원 전기공학과) ;
  • 한병성 (전북대학교 전기공학과 부교수)
  • Published : 1992.07.23
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Abstract

Since the discovery of High-Tc superconducting Y-Ba-Cu-O ceramics with critical temperature of about 90K, numerous efforts to prepare supercond ucting thin films with excellent qualities such as High-Tc and critical current density have been made. The samples were deposited onto $SiO_x$ substrates heated at 540$^{\circ}C$ - 600$^{\circ}C$ in a single target rf - magnetron sputtering system. The film thickness has 2000$\AA$ - 5000 $\AA$ with a rate of 16 $\AA$/min. and distance between target and substrate was 50 mm. The films were characterized by X - ray diffraction, scanning electron microscopy and critical temperature.

Keywords