대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1991년도 추계학술대회 논문집 학회본부
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- Pages.299-303
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- 1991
램프 가열 방식 LPCVD 장비의 설계 및 제작
Design and Implementation of Lamp-Heated LPCVD System
- Ha, Yong-Min (Korea Advanced Institute of Science and Technology) ;
- Kim, Tae-Sung (Korea Advanced Institute of Science and Technology) ;
- Kim, Choong-Ki (Korea Advanced Institute of Science and Technology)
- 발행 : 1991.11.22
초록
A lamp heated LPCVD equipment has been made. Wafer is heated by an array of fifteen tungsten halogen lamps above the front side of a wafer and pyrometer views the back side of the wafer through
키워드