A Study on a Silicon Resonator for Piezoresistive Accelerometer

압전저항 가속도계를 위한 실리콘 공진자에 관한 연구

A piezoresistive silicon resonator which can be used as an accelerometer is designed and fabricated using silicon micromachining techniques. The device consists of a seismic mass and four deflection beams in which eight piezoresistors are diffused. The structure is fabricated by EPW etching process. The piezoresistors are properly arranged and connected to make a bridge circuit, with which acceleration in only one direction can be measured. According to the experimental results, the first resonant frequency of this resonator is above 15 kHz, and this transducer has a sensitivity of 5.56 ${\mu}V/Vg$.