한국막학회:학술대회논문집 (Proceedings of the Membrane Society of Korea Conference)
- 한국막학회 1991년도 추계 총회 및 학술발표회
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- Pages.17-26
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- 1991
ROLE OF MEMBRANE MODULES IN ULTRAPURE WATER SYSTEM FOR THE CURRENT SEMICONDUCTORS INDUSTRIES
초록
It can be said that the current ULSI technology has been supported and/or accomplished by a major challenge to the clean room environment and the ultrapure water equipment manufacturers as to contamination control. The required improvement in ultrapure water quality, which is shown in Figure 1, would not have been possible without significant improvements in membrane performance and enhancements in analytical capabilities.
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