A Study on the polymer humidity sensor using plasma polymerized films.

플라즈마 중합막을 이용한 고분자 습도센서에 관한 연구

In this study we fabricated thin organic polymer films on the comb-electrode by plasma polymerization methode in electrode gas flow type reactor. The dielectric constant of polymer films were increased by increasing relative humidity and we used free volume theory in order to explain the mechanism of water absorption phenomena of polymer films.