대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1991년도 하계학술대회 논문집
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- Pages.191-193
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- 1991
Laser CVD절연막의 전기전도와 절연파괴특성
The eletrical conduction and breakdown characteristics of thin films by Laser CVD
- Kang, H.B. (Dept. of Electrical Eng. Korea Univ.) ;
- Kwon, B.J. (Dept. of Electrical Eng. Korea Univ.) ;
- Kim, Y.W. (Dept. of Electrical Eng. Korea Univ.) ;
- Kim, S.J. (Dept. of Electrical Eng. Korea Univ.) ;
- Sung, Y.K. (Dept. of Electrical Eng. Korea Univ.)
- 발행 : 1991.07.18
초록
In this paper, we introduce silicon dioxide films deposited by Laser CVD, and evaluate the breakdown characteristics of these films by TZDB(Time Zero Dieiectric Breakdown) and TDDB(Time Dependent Dielectric Breakdown) test, failure times against eletric field are examined and accelation factors
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