대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1991년도 하계학술대회 논문집
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- Pages.178-182
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- 1991
$TiSi_2$ SALICIDE CONTACT의 전기적 특성
Electrical Characteristics of $TiSi_2$ Salicide Contact
- Lee, Cheol-Jin (Dept. of Electrical Eng., Korea Univ.) ;
- Yang, Ji-Woon (Dept. of Electrical Eng., Korea Univ.) ;
- Lee, Nae-In (Dept. of Electrical Eng., Korea Univ.) ;
- Sung, Yung-Kwon (Dept. of Electrical Eng., Korea Univ.)
- 발행 : 1991.07.18
초록
Contact resistance and contact leakage current of the
키워드