Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1991.07a
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- Pages.178-182
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- 1991
Electrical Characteristics of $TiSi_2$ Salicide Contact
$TiSi_2$ SALICIDE CONTACT의 전기적 특성
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Lee, Cheol-Jin
(Dept. of Electrical Eng., Korea Univ.) ;
- Yang, Ji-Woon (Dept. of Electrical Eng., Korea Univ.) ;
- Lee, Nae-In (Dept. of Electrical Eng., Korea Univ.) ;
- Sung, Yung-Kwon (Dept. of Electrical Eng., Korea Univ.)
- Published : 1991.07.18
Abstract
Contact resistance and contact leakage current of the
Keywords