Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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The Characteristic of Discharge and Sputtering on the DC Magnetron System

직류 마그네트론 시스템에서 방전 및 스파터링 특성

  • Published : 1990.11.17
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Abstract

A dc magnetron system for cathode sputtering with a spool-shaped cathode is described. The sputtering conditions are discussed concerning pressure, magnetic field and discharge current.

Keywords