Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1990.11a
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- Pages.173-175
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- 1990
The Characteristic of Discharge and Sputtering on the DC Magnetron System
직류 마그네트론 시스템에서 방전 및 스파터링 특성
Abstract
A dc magnetron system for cathode sputtering with a spool-shaped cathode is described. The sputtering conditions are discussed concerning pressure, magnetic field and discharge current.
Keywords