Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1990.11a
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- Pages.85-87
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- 1990
Electrical Properties of Laser CVD Silicon Nitride Film
Laser CVD SiN막의 전기적 특성
- Kim, Yong-Woo (Dept. of Electrical Eng., Korea University) ;
- Kim, Sang-Wook (Dept. of Electrical Eng., Korea University) ;
- Park, Jong-Wook (Dept. of Electrical Eng., Korea University) ;
- Kim, Chun-Sub (Dept. of Electrical Eng., Korea University) ;
- Sung, Yung-Kwon (Dept. of Electrical Eng., Korea University)
- Published : 1990.11.17
Abstract
Silicon nitride film was deposited on a silicon wafer using a laser CVD(LCVD) technique, which is based on direct photolysis of
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