대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1990년도 하계학술대회 논문집
- /
- Pages.471-474
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- 1990
반도체 소자(IC)의 검사 자동화를 위한 IC 표면의 마크 검사시스템 개발
Developement of IC Mark Checking System for IC Inspection Automation
-
변증남
(한국과학기술원 전기및전자공학과)
;
-
유범재
(한국과학기술원 전기및전자공학과)
;
- 한동일 (한국과학기술원 전기및전자공학과) ;
-
오상록
(한국과학기술연구원 제어시스템연구실)
;
- 김정덕 (삼성항공산업(주)) ;
- 하경호 (삼성항공산업(주))
-
Bien, Zeung-Nam
(Dept. of Elec. Eng., KAIST)
;
-
You, Bum-Jae
(Dept. of Elec. Eng., KAIST)
;
- Han, Dong-Il (Dept. of Elec. Eng., KAIST) ;
-
Oh, Sang-Rok
(Control Systems Lab., KIST)
;
- Kim, Jung-Duck (Samsung Aerospace Co., Ltd.) ;
- Ha, Kyung-Ho (Samsung Aerospace Co., Ltd.)
- 발행 : 1990.07.05
초록
In this paper, a vision-based inspection algorithm for checking mark quality on an integrated chip(IC) is proposed. In order to reduce the processing time for inspection, we are implemented image arithmetic unit and binary image projection processor in hardware. By adopting the hardwares, the processing time becomes less one sixth of that in case of using software only.
키워드