대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
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표면예비전리 방식을 사용한 KrF 엑사이머 레이저의 개발

Development of KrF Excimer Laser with surface discharge preionization

  • 박홍진 (경희대학교 전자공학과) ;
  • 이주희 (경희대학교 전자공학과)
  • Park, Hong-Jin (Department of Electronic Engineering, Kyung Hee University) ;
  • Lee, Choo-Hie (Department of Electronic Engineering, Kyung Hee University)
  • 발행 : 1990.07.05
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초록

We report the development of a surface discharge preionized KrF discharge Laser with a new type of high-brightness Corona preionizer using a segmented columnar $BaTiO_3$ dielectric. This Laser characteristic was higher value than that obtained with the conventional corona preionizer using a glass, $Al_2O_3ceramic$, Kapton film, or a Teflon insulator.

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