Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1990.07a
- /
- Pages.462-464
- /
- 1990
Development of KrF Excimer Laser with surface discharge preionization
표면예비전리 방식을 사용한 KrF 엑사이머 레이저의 개발
- Park, Hong-Jin (Department of Electronic Engineering, Kyung Hee University) ;
- Lee, Choo-Hie (Department of Electronic Engineering, Kyung Hee University)
- Published : 1990.07.05
Abstract
We report the development of a surface discharge preionized KrF discharge Laser with a new type of high-brightness Corona preionizer using a segmented columnar
Keywords