$1{\mu}m$ 이하의 게이트 길이를 갖는 GaAs MESFET

GaAs MESFETs with the submicronmeter gate length

GaAs MESFETs with the submicron gat are fabricated. $G_{m,mas}$ = 195mS/mm with the $0.5{\mu}m$ gate length and $G_{m,mas}$ = 170mS/mm with the $0.6{\mu}m$ gate lenth. $f_{mas}$ = 7GHz with the $1.5{\mu}m$ gate length and the $120{\mu}m$ gate width. We can estimate that $f_{mas}$ = 15GHz with $0.6{\mu}m$ gate length and that $f_{mas}$ = 18 ${\sim}$ 20GHz with the $0.5{\mu}m$ gate length.