대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
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방전어기 KrF 레이저의 프라즈마 프로세서 해석

Theoreitica1 analysis of plasma processes in discharge excited KrF laser

  • 최부연 (경희대학교 전자공학과) ;
  • 이주희 (경희대학교 전자공학과)
  • Choi, Boo-Yeon (Department of Electronic Engineering, Kyung Hee Univ.) ;
  • Lee, Choo-His (Department of Electronic Engineering, Kyung Hee Univ.)
  • 발행 : 1989.11.25
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초록

A computer simulation code of UV preionized discharge KrF laser is developed, including time dependent circuit equations, boltzmann equations, and plasma kinetic equations for various atomic and molecular species. Rate constants for electron collision processes are calculated with a boltzmann equations as a function of E/N. In this study, we studied mainly the $KrF^*$ formation process, relaxation process, and the 248nm absorption process as a function of charging voltage.

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