Fabtication of Proton-Diffused $LiNbO_3$ Waveguides with Self-aligned $SiO_2$-Cladding

자기정렬된 $SiO_2$ 클래딩을 이용한 $LiNbO_3$ 광도파로의 제작

  • 손영성 (한국과학기술원 전기 및 전자공학과)
  • Published : 1989.02.01

Abstract

A new fabrication method of proton-diffused LiNbO3 channel waveguides with self-aligned SiO2-Cladding structures are reported, which provides easy control of mode pattern shapes and sizes.

Keywords