제어로봇시스템학회:학술대회논문집

Institute of Control, Robotics and Systems (제어로봇시스템학회)
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Influence of air pressure, temperature, humidity and CO$_{2}$ concentration on optical phase changes in thin films

  • Kim, Moon-Hwan (Corporate RandD Department 1 Yokogawa Electric Corporation) ;
  • Tachikawa, Yoshihiko (Corporate RandD Department 1 Yokogawa Electric Corporation) ;
  • Ogita, Eiji (Corporate RandD Department 1 Yokogawa Electric Corporation) ;
  • Ueda, Toshitsugu (Corporate RandD Department 1 Yokogawa Electric Corporation)
  • Published : 1989.10.01
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Abstract

A new method for measuring optical phase changes of reflection beam from optical mirror is proposed. The optical phase change is liable to change with varying atmosphere conditions. This optical phase changes are measured against air pressure, temperature, humidity and CO$\_$2/ concentration variations. It is clarified that the optical phase changes are most effected by humidity change.

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