Analysis of discharge characteristics of KrF laser system with UV preionization

자외선 예비전리 KrF 레이저의 방전특성 해석

We have developed analysis program of discharge chracteristics of KrF laser system with charge transfer type, that studied about deposited energy, nonlinear discharge, and electron number density in the laser tube. With this program, voltagr, current, and deposited energy was calculated 27 KV,32.6 KA,200 MW at total pressure 2 atm and charging voltage 33 KV, respectively. At this condition, circuit parameters are L1=150nH, R1=$0.3{\Omega}$, L2=15nH, R2= $0.3{\Omega}$. In addition, nonlinear discharge resistance and electron number density was calculated ${\infty}{\sim}0.17{\Omega}.1{\times}10^{16}cm^{-3}$, respectively.