Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Langmuir poobe method for the diagnostic of plasma

Langmuir 전극법에 의한 플라즈마진단

  • Published : 1989.07.21
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Abstract

In this paper, we study about the degree measurement which is applied by the pirani gauge's theory arid the basic analysis of plasmsa which is generated by the D.C glow discharge.

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