대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1989년도 하계종합학술대회 논문집
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- Pages.426-428
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- 1989
평면형 PLASMA 시스템에서의 방전 전압에 관한 연구
A STUDY OF DISCHARGE VOLTAGE IN PLANER PLASMA SYSTEM
- Kim, Jong-Sik (Dept. of Electronic Eng. POSTECH) ;
- Kang, Bong-Ku (Dept. of Electronic Eng. POSTECH) ;
- Kwon, O-Dae (Dept. of Electronic Eng. POSTECH)
- 발행 : 1989.07.21
초록
As a first phase of plasma study intended for semiconductor processing research, we have studied the discharge phenomena. In particular, we have obtained a specific formula for the breakdown voltage as a function of the neutral state pressure of reactive gases. Our experimental results with H2,O2,Ar,CF4 seem ro verify this formula. In addition we find the voltage levels for various gases in the descending order of CF4>O2=Ar>H2 in high pressure region, while H2>CF4>O2>Ar in low pressure region. When H2 and CF4 were mixed, we observe the overall voltage dominated by the gas with lower breakdown volotage.
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