Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1989.07a
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- Pages.390-393
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- 1989
A Study on the Diamond Synthesis by MPECVD using $CO-H_2$ Mixture
$CO-H_2$ 혼합 기체의 MPECVD 에 의한 다이아몬드 합성에 관한 연구
- Ku, Ja-Chun (SNU, Dep. of Electric Eng., PLASMA Lab.) ;
- Oh, Jeong-Seob (SNU, Dep. of Electric Eng., PLASMA Lab.) ;
- Hwang, Ki-Woong (SNU, Dep. of Electric Eng., PLASMA Lab.)
- Published : 1989.07.21
Abstract
Diamond is synthesized from the gaseous mixture of carbon monoxide and hydrogen by microwave PECVD.
Keywords