대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
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Pyrosol 법에 의한 투명전도성 산화물 박막 제작

Deposition of TCO Films by Pyrosol Method

  • 발행 : 1989.07.21
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초록

Using pyrosol method, based on the pyrolysis of an aerosol produced by ultrasonic spraying, the deposition of transparent conducting oxides (TCO) such as $In_2O_3$ : Sn, $SnO_2$ : Sb and $SnO_2$ : F on glass substrates was studied. The electrical, optical and structural properties as functions of substrate temperature, dopant concentration, substrate type and carrier gas type were investigated.

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