Deposition of TCO Films by Pyrosol Method

Pyrosol 법에 의한 투명전도성 산화물 박막 제작

Using pyrosol method, based on the pyrolysis of an aerosol produced by ultrasonic spraying, the deposition of transparent conducting oxides (TCO) such as $In_2O_3$ : Sn, $SnO_2$ : Sb and $SnO_2$ : F on glass substrates was studied. The electrical, optical and structural properties as functions of substrate temperature, dopant concentration, substrate type and carrier gas type were investigated.