Development of semiconductor process information system

반도체 공정정보 관리 시스템 개발

Various types and huge volume of information such as process instructions, work-in process and parametric data are created in a wafer fabrication process and should be provided to personnels inside or outside the facility. This article describes design criteria and functional description on the information system for small-scale wafer fabrication process to accomplish paperless fab and to support efficient fab management.