제어로봇시스템학회:학술대회논문집
- 1988.10a
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- Pages.401-406
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- 1988
Development of semiconductor process information system
반도체 공정정보 관리 시스템 개발
Abstract
Various types and huge volume of information such as process instructions, work-in process and parametric data are created in a wafer fabrication process and should be provided to personnels inside or outside the facility. This article describes design criteria and functional description on the information system for small-scale wafer fabrication process to accomplish paperless fab and to support efficient fab management.
Keywords