Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Global Coordinate Extraction of IC Chip Pattern using Vertex-Form Matching

꼭지점 형태 정합을 이용한 집적회로 패턴의 전체 좌표 추출

  • Ahn, Hyun-Sik (Dept. of Electronics, Kyungpook National University) ;
  • Lee, Wang-Goog (Dept. of Electronics, Kyungpook National University) ;
  • Cho, Seok-Je (Dept. of Electronics, Kyungpook National University) ;
  • Ha, Yeong-Ho (Dept. of Electronics, Kyungpook National University)
  • 안현식 (경북대학교 공과대학 전자공학과) ;
  • 이왕국 (경북대학교 공과대학 전자공학과) ;
  • 조석제 (경북대학교 공과대학 전자공학과) ;
  • 하영호 (경북대학교 공과대학 전자공학과)
  • Published : 1988.07.01
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Abstract

Recognition of IC chip pattern requires extraction of features, which have the information of vertex position and orientation. Edges are extracted and straightening algorithm is applied to the edges, so that lines are obtained. With these extracted data, the coordinate and orientation of all vertices are extracted and vertex-form matching is applied to the locally overlapped area of neighborhood frames to have global coordinate of IC chip.

Keywords