Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1988.07a
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- Pages.393-396
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- 1988
The Analysis of Discharge Characteristics for Discharge Excited KrF Laser System
방전여기 KrF 레이저 장치의 방전특성 해석
- Jeong, Jae-Keun (Dept. of Electronic Engineering, Kyung Hee Univ.) ;
- Choi, Boo-Yeon (Dept. of Electronic Engineering, Kyung Hee Univ.) ;
- Lee, Choo-Hie (Dept. of Electronic Engineering, Kyung Hee Univ.)
- Published : 1988.07.01
Abstract
In discharge excited excimer laser, it is hard to say that the analysis of laser operation was well explained until now. But this can be improved by analysis the nonlinear discharge characteristics in the cavity. The nonlinear characteristics can be analysed by solving the nonlinear resistance which depends on electron mobility and number density. We can calculate the electron mobility and number density each other using Boltzmann equation and Kinetics equation. So we calculated the nonlinear resistance and analysed nonlinear discharge characteristics.
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