Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1988.07a
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- Pages.379-382
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- 1988
RTA system design modeling to reduce slip
Slip 현상을 줄이기위한 RTA(고속열처리) 장치 설계모델링
- Jang, Hyeon-Yong (Dept. of Electronic Eng. Chung Ang University) ;
- Hang, Seung-Yun (Dept. of Electronic Eng. Chung Ang University) ;
- Hwang, Ho-Jung (Dept. of Electronic Eng. Chung Ang University)
- Published : 1988.07.01
Abstract
In this paper optimal light source arraies are calculated to reduce slips in RTA process. A two-channel temperature controller is constructed on a board using IBM - XT to improve the temperature uniformity. The proposed RTA structure has also advantage of power dissipation.
Keywords