대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1988년도 전기.전자공학 학술대회 논문집
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- Pages.360-362
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- 1988
새로운 $NH_{3}-O_{2}$ 산화 방법(1) - 매카니즘 및 결정성
A New $NH_{3}-O_{2}$ Oxidation Method (1) - Mechanism and Crystal Properties
- Bock, Eun-Kyung (Dept. of Electronics, Seoul City Univ.) ;
- Park, Sun-Woo (Hyundae Electro. Ind. Co.) ;
- Kim, Chul-Ju (Dept. of Electronics, Seoul City Univ.)
- 발행 : 1988.07.01
초록
The new oxidation method was presented to grow the oxide layer by thermal reaction of
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