A study on the measurement of layer thickness using acoustic microscope.

음향현미경을 이용한 layer의 두께측정에 관한 연구

In this paper, a methodology for determination of the thickness of layer on a substrate using reflection acoustic microscope has been presented. It has been shown that the amplitude and the phase of reflection coefficient of the layer-substrate composite has been used for measurement of layer thickness, acoustic velosity, mass density of the layer material. The reflection acoustic microscope operating at a frequency of 15 MHz has been used for the experiment and the measured acoustic impedance value for aluminum sample has agreed with the published data, and the measured layer thickness for silver-glass composite has agreed with that measured using micrometer.