반사형 음향 현미경의 구성과 그 응용

The construction of Accoustic Reflection Microscope and its application

In this paper, acoustic reflection microscope system has been built for the purpose of detecting subsurface defects in materials and demonstrated for nondestructive testing application. 100 won coin, aluminuim, ceramics, and IC component employed as experimental samples and acoustic reflection microscope was operated in the focused and defocused mode at a frequency of operation of 3 MHz. It has been found that acoustic reflection icroscope has the resolution of 500 ${\mu}{\textrm}{m}$ and it has been an excellent tool for nondestructive testing.