Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1987.07a
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- Pages.549-552
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- 1987
ELECTRICAL CHARACTERISTICS OF STACKED FILM TO INCREASE CAPACITANCE
CAPACITANCE 증가를 위한 STACKED FILM의 전기적 특성 연구
- Choi, Jong-Wan (SAMSUNG SEMICONDUCTOR LABORATORY) ;
- Yu, Jae-An (SAMSUNG SEMICONDUCTOR LABORATORY) ;
- Choi, Jin-Seog (SAMSUNG SEMICONDUCTOR LABORATORY) ;
- Rhieu, Ji-Hyo (SAMSUNG SEMICONDUCTOR LABORATORY) ;
- Song, Sung-Hae (SAMSUNG SEMICONDUCTOR LABORATORY)
- Published : 1987.07.03
Abstract
TO INCREASE THE CELL CAPACITANCE Of SMALL GEOMETRY DRAMS. HIGH DIELECTRIC MATERIAL HAS BEEN USED RECENTLY. THE PURPOSE Of THIS WORK IS TO INVESTIGATE THE STRUCTURAL AND ELECTRICAL CHARACTERISTICS Of SiO2/Si3N4/SiO2 STACKED FILM UTILIZING HIGH DIELECTRIC MATERIAL Si3N4(
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