Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1987.07a
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- Pages.481-485
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- 1987
The fabrication of micro mass flow sensor by Micro-machining Technology
Micromachining 기술을 이용한 micro mass flow sensor의 제작
- Eoh, Soo-Hae (Yeungnam Junior College of Technology) ;
- Choi, Se-Gon (Yeungnam University)
- Published : 1987.07.03
Abstract
The fabrication of a micro mass flow sensor on a silicon chip by means of micro-machining technology is described on this paper. The operation of micro mass flow sensor is based on the heat transfer from a heated chip to a fluid. The temperature differences on the chip is a measure for the flow velocity in a plane parallel with the chip surface. An anisotropic etching technigue was used for the formation of the V-type groove in this fabrication. The micro mass flow sensor is made up of two main parts ; A thin glass plate embodying the connecting parts and mass flow sensor parts in silicon chip. This sensor have a very small size and a neglible dead space. Micro mass flow sensor can fabricate on silicon chip by micro machining technology too.
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