대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1987년도 전기.전자공학 학술대회 논문집(I)
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- Pages.473-476
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- 1987
저온 CVD PN-InP MISFETs
Low-temperature CVD PN-InP MISFETs
- 정윤하 (포항공과대학 전기전자공학과)
- Jeong, Yoon-Ha (Pohang Institute of Science & Technology Department of Electrical & Electronic Engineering)
- 발행 : 1987.07.03
초록
Low temperature phosphorus-nitride CVD was newly developed for a high quality gate insulator on InP substrate. This film showed the Poole-Frenkel type conduction in high electric field with resistivity higher than
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